Room-temperature scanning Hall probe microscope (RT-SHPM) imaging of garnet films using new high-performance InSb sensors

摘要

The room-temperature scanning Hall probe microscopy (RT-SHPM) imaging of garnet films using high-performance InSb sensors was discussed. The high-performance InSb micro-Hall sensors were fabricated by optical lithography. It was found that the room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which was an order of magnitude better than GaAs-AlGaAs two-dimensional electron gas sensors.